Research Home
Tools
Art & Architecture Thesaurus
Source Record
Source ID:
2000091996
Brief Citation:
Doi et al. Advances in CMP/Polishing Technologies (2012)
Full Citation:
Doi, Toshiro K. et al. Advances in CMP/Polishing Technologies for the Manufacture of Electronic Devices. Oxford; Waltham, MA: Elsevier, 2012.
The J. Paul Getty Trust
© 2004 J. Paul Getty Trust
Terms of Use
/
Privacy Policy
/
Contact Us